Waferpedia

Tool family

Disco DCS 141

DiscoWet Processing / Clean2 entries
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Models in this family

  1. DCS 141 Automatic Cleaning
  2. DCS 141 Wafer Cleaner Spin

    The Disco DCS 141 is a wafer cleaner / spin dryer.

All entries

  1. DCS 141 Automatic CleaningDisco
    CategoryWet Processing / Clean
    3 specs
  2. DCS 141 Wafer Cleaner SpinDisco

    The Disco DCS 141 is a wafer cleaner / spin dryer.

    CategoryWet Processing / Clean
    4 specs