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Disco

DCS 141 Automatic Cleaning

Wet Processing / CleanDisco DCS 141 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

DCS 141 Automatic Cleaning — Inventory photo
Fig. 01DCS 141 Automatic CleaningInventory photo[1]

Power

Single Phase[1]

Vacuum

2-12 MPa[2]

What it is

The Disco DCS 141 Automatic Cleaning is a wafer cleaning station with single-phase 220V operation at 50/60 Hz.[1][3]

How it works

The Disco DCS 141 cleans semiconductor wafers by spinning the workpiece while applying cleaning discharge, and the unit also cleans glass, ceramics, and other workpieces.[2]

The Disco DCS 141 has a rotating speed range from 0 to 3000 rpm and a spinning discharge pressure from 2 to 12 MPa.[2]

Where it fits in the process flow

The Disco DCS 141 is appropriate for use with an automatic dicing saw and other machines that lack a cleaning function.[2]

Applications

The Disco DCS 141 is used for cleaning semiconductor wafers.[2]

The Disco DCS 141 is also used for glass, ceramics, and a wide variety of other workpieces.[2]

What do the numbers mean?

Power & electrical4

Single Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
Voltage
220V[1]
Accurate?
Power electrical
Single Phase, 50/60 Hz, 220V[1]
Accurate?

Vacuum & pumping1

Spinning discharge pressure
2-12 MPa[2]
Accurate?

Configuration & options2

Maximum workpiece size
8 inch[2]
Accurate?
Rotating speed range
0-3000 rpm[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationSingle Phase[1]
  • Configuration50/60 Hz[1]
  • Voltage220V[1]
  • Power electricalSingle Phase, 50/60 Hz, 220V[1]
  • Spinning discharge pressure2-12 MPa[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of machine is the Disco DCS 141 Automatic Cleaning?

The Disco DCS 141 Automatic Cleaning is an automatic cleaning system.[1][3]

Not publicly documented

The following facts about the DCS 141 Automatic Cleaning are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DCS 141 Automatic Cleaning are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DCS 141 Automatic Cleaning are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DCS 141 Automatic Cleaning are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DCS 141 Automatic Cleaning are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DCS 141 Automatic Cleaning is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]polifab.polimi.it — polifab.polimi.itpolifab.polimi.it
  3. [3]DCS 141 Automatic Cleaning — Disco | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 12, 2026.

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