Waferpedia

Tool family

Disco DFG 841

DiscoCMP2 entries
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Models in this family

  1. DFG 841 Automatic
  2. DFG 841 Grinder Lapper

    The Disco DFG 841 is a grinder/lapper/polisher for 8-inch wafers with automated wafer handling and two porous-vacuum chuck tables.

All entries

  1. DFG 841 AutomaticDisco
    CategoryDicing & Grinding
    4 specs
  2. DFG 841 Grinder LapperDisco

    The Disco DFG 841 is a grinder/lapper/polisher for 8-inch wafers with automated wafer handling and two porous-vacuum chuck tables.

    CategoryCMPWaferRobot Unit– automated wafer handling between cassettes and chuck tables.
    18 specs