Electroglas EG5

Models in this family

1. 

   EG5

   Electroglas EG5|300 is a wafer prober line that includes the ARGOS and EG5|300e variants.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   EG5|300 ARGOS	—	—	Described as Electroglas' highest accuracy 300mm wafer prober; includes precise stepping accuracy, integrated alignment system, air bearing closed-loop linear motion system, and capability for 150mm, 200mm, and 300mm wafers.	web.archive.org[1]
   EG5|300e	—	—	Fine-pitch probing for in-line parametric test structures.	web.archive.org[1]

Sources