Tool family
EV Group 620
Models in this family
The EVG 620 Aligner is a mercury lamp exposure system or LED exposure system for 4-inch and 6-inch wafers.
The EVG 620 Mask Aligner is a mask alignment tool for semiconductor manufacturing, supporting wafer sizes from 2 to 12 inches.
All entries
- 620EV Group
The EVG 620 Aligner is a mercury lamp exposure system or LED exposure system for 4-inch and 6-inch wafers.
CategoryLithography9 specs - 620 MaskEV Group
The EVG 620 Mask Aligner is a mask alignment tool for semiconductor manufacturing, supporting wafer sizes from 2 to 12 inches.
CategoryLithographyWafer3 Station Wafer Handler42 specs