Waferpedia

Tool family

EV Group 620

EV GroupLithography2 entries
LinkedIn X Email

Models in this family

  1. 620

    The EVG 620 Aligner is a mercury lamp exposure system or LED exposure system for 4-inch and 6-inch wafers.

  2. 620 Mask

All entries

  1. 620EV Group

    The EVG 620 Aligner is a mercury lamp exposure system or LED exposure system for 4-inch and 6-inch wafers.

    CategoryLithography
    2 specs
  2. 620 MaskEV Group
    CategoryLithography
    23 specs