Waferpedia

Tool family

EV Group 6200

EV Group2 entries
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Models in this family

  1. 6200 Mask

    The EVG 6200 Mask Aligner is a lithography tool configured for 6-inch and 8-inch wafers.

  2. 6200 NT Semi Automated Bottom Side Alignment

    The EVG 6200 NT is a semi automated bottom side alignment system with double-side operation and manual handling.

All entries

  1. 6200 MaskEV Group

    The EVG 6200 Mask Aligner is a lithography tool configured for 6-inch and 8-inch wafers.

    CategoryLithography
    5 specs
  2. 6200 NT Semi Automated Bottom Side AlignmentEV Group

    The EVG 6200 NT is a semi automated bottom side alignment system with double-side operation and manual handling.

    13 specs