Tool family
The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.
The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| F50-UV | — | — | Distinguished by wavelength range; described as requiring shorter wavelengths for thinner films. | web.archive.org[1] |
| F50-NIR | — | — | Distinguished by wavelength range; longer wavelengths allow measurement of thicker, rougher, and more opaque films. | web.archive.org[1] |
| F50-EXR | — | — | Distinguished by wavelength range. | web.archive.org[1] |
| F50-UVX | — | — | Distinguished by wavelength range. | web.archive.org[1] |
| F50-XT | — | — | Distinguished by wavelength range. | web.archive.org[1] |
| F50 | — | — | Standard F50 model listed in the archived Filmetrics product page with wavelength range 380-1050nm and thickness range 15nm–70um. | web.archive.org[1] |