Waferpedia

Tool family

Filmetrics F50

The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.

Models in this family

  1. The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    F50-UVDistinguished by wavelength range; described as requiring shorter wavelengths for thinner films.web.archive.org[1]
    F50-NIRDistinguished by wavelength range; longer wavelengths allow measurement of thicker, rougher, and more opaque films.web.archive.org[1]
    F50-EXRDistinguished by wavelength range.web.archive.org[1]
    F50-UVXDistinguished by wavelength range.web.archive.org[1]
    F50-XTDistinguished by wavelength range.web.archive.org[1]
    F50Standard F50 model listed in the archived Filmetrics product page with wavelength range 380-1050nm and thickness range 15nm–70um.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org