Waferpedia

Tool family

GCA 3696

GCA1 entry

The GCA 3696 is identified as a photorepeater system that can expose photoresist-coated glass plates up to 7 inches.

Models in this family

  1. 3696g-line

    The GCA 3696 is a step-and-repeat camera (photorepeater) built around a DEC PDP-11/04 minicomputer.

    Cited variants

    DesignationGenerationVintageChangesSource
    GCA 6300 DSW 5X g-line Wafer Stepperg-lineDescribed as a wafer stepper that can be converted to function as a GCA 3696 Photorepeater system.cnfusers.cornell.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]cnfusers.cornell.educnfusers.cornell.edu