GCA 6300 DSW

Models in this family

1. 

   6300 DSWg-line

   The GCA 6300 DSW is a g-line wafer stepper used for lithography, with source descriptions also identifying related i-line GCA 6300 stepper documentation.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   GCA 6300 DSW 5X g-line Wafer Stepper	g-line	—	Described as a 5X g-line wafer stepper.	cnfusers.cornell.edu[1]
   GCA 6300 I-Line Wafer Stepper	i-line	—	Described as an i-line wafer stepper with manual wafer loading and up to 6-inch wafers.	wiki.nanofab.ucsb.edu[2]

Sources