Tool family
GCA 8500 Wafer
GCA 8500 Wafer Stepper.
Models in this family
The GCA 8500 is a commercial wafer stepper from GCA that performs 5x-reduction i-line photolithography, accepts 150 mm wafers, and resolves sub-micron features.
Tool family
GCA 8500 Wafer Stepper.
The GCA 8500 is a commercial wafer stepper from GCA that performs 5x-reduction i-line photolithography, accepts 150 mm wafers, and resolves sub-micron features.
