GCA
8500 Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The GCA 8500 is a wafer stepper used for photolithography, performing 5x reduction. The GCA 8500 uses an i-line exposure source and resolves sub-micron features. The GCA 8500 accepts 150 mm wafers.[1][2]
What it is
How it works
The GCA 8500 utilizes a 5x reduction lens. The stepper includes a 5-axis alignment system.[1]
Where it fits in the process flow
General reference — not yet source-verifiedWafer steppers are used in the photolithography stage of semiconductor fabrication. The process step follows wafer cleaning and photoresist coating. After exposure, the wafer proceeds to post-exposure bake and development.
What do the numbers mean?
Wafer handling7
Optics & imaging2
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer materials can the GCA 8500 process?
The GCA 8500 can process silicon and silicon-on-insulator wafers.[3]
Not publicly documented
The following facts about the 8500 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8500 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 8500 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8500 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8500 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 8500 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]journals.plos.org — journals.plos.orgjournals.plos.org
- [3]mems-exchange.org — mems-exchange.orgmems-exchange.org
Last updated Sep 1, 2026.
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