Waferpedia

Tool family

Hitachi S 9380

Models in this family

  1. The Hitachi S 9380 is a CD-SEM (Critical Dimension Scanning Electron Microscope).

  2. The Hitachi S 9380 II CD-SEM is a critical dimension scanning electron microscope.

All entries

  1. S 9380Hitachi
    CategoryMetrology & Inspection
    2 specs
  2. S 9380 CD-SEMHitachi

    The Hitachi S 9380 is a CD-SEM (Critical Dimension Scanning Electron Microscope).

    CategoryMetrology & Inspection
    4 specs
  3. S 9380 II CD-SEMHitachi

    The Hitachi S 9380 II CD-SEM is a critical dimension scanning electron microscope.

    CategoryMetrology & Inspection
    7 specs