Waferpedia

Tool family

JEOL JBX-8100FS

JEOL1 entry

JEOL JBX-8100FS is identified as a maskless lithograph ML2 type based on a patented ZrO/W (Schottky) emitter.

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    G1Entry model; optional accessories can be added as needed.jeol.com[1]
    G2Full option model.jeol.com[1]
    G3200 kV model.jeol.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]jeol.comjeol.com