JEOL

JBX-8100FS

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JEOLJBX-8100FS

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What is it?

The provided source explicitly mentions the JEOL JBX-8100FS in JEOL's products section and describes it as a maskless lithograph ML2 type based on a patented ZrO/W (Schottky) emitter. No additional technical details are stated in the source excerpt.

What do the numbers mean?

Optics & imaging1

machine type: maskless lithograph ML2 type^[1]

Configuration & options1

emitter: patented ZrO/W (Schottky) emitter^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
G1	—	—	Entry model; optional accessories can be added as needed.	jeol.com^[2]
G2	—	—	Full option model.	jeol.com^[2]
G3	—	—	200 kV model.	jeol.com^[2]

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the JBX-8100FS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

Fewer than 3 independently cited specifications for the JBX-8100FS are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the JBX-8100FS are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the JBX-8100FS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the JBX-8100FS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the JBX-8100FS is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
[2]jeol.com — jeol.comjeol.com
[3]JEOL JBX-8100FS | Nanoscale Characterization and Fabrication Laboratory | Virginia Tech — ncfl.ictas.vt.eduncfl.ictas.vt.edu
[4]E-Beam Lithography System - Advanced Nanofabrication Facility — nanofab.ubc.cananofab.ubc.ca
[5]JBX-8100FS Direct Write System | Spot Beam Lithography System — jeolusa.comjeolusa.com
[6]JBX-8100FS - JEOL (Germany) GmbH and Nordic (AB) — jeol.dejeol.de