Waferpedia

Tool family

Karl Suss MA-4

Karl SussLithography1 entry

The Karl Suss MA-4 is a contact/proximity mask aligner used for substrates up to 4" (100mm) in diameter.

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Models in this family

  1. MA-4

    The Karl Suss MA-4 is a contact/proximity mask aligner used for substrates up to 4" (100mm) in diameter.