Karl Suss MA6

Models in this family

1. 

   MA6i-line

   The Karl Suss MA6 is a high-resolution semi-automated photolithography mask aligner for research, development, and small-volume production.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MA4	—	—	The MA6 and MA4 Mask Aligners use UV light to transfer patterns from photomasks onto substrates coated with photoresist; the MA6 is listed with wafers up to 6 inches while the MA4 is listed with wafers up to 4 inches.	ece.utoronto.ca[1]
   MA6/BA6	—	—	Front and backside alignment capabilities are stated for the MA6/BA6 mask aligners.	louisville.edu[2]

Sources