Waferpedia

Tool family

Karl Suss MJB-3

The Karl Suss MJB-3 is a contact/proximity mask aligner used with substrates up to 3 inches in diameter and capable of 365 nm or 405 nm illumination.

Models in this family

  1. The Karl Suss MJB-3 is a contact/proximity mask aligner used with substrates up to 3 inches in diameter and capable of 365 nm or 405 nm illumination.