Keysight
5517 C
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Keysight/Agilent 5517 C is a laser. The 5517 C is compatible with ASML PAS 5500 systems.[1][2][3]
Power
2.81 MHz[5]
Vacuum
2 ppb (1 hour)[4]
Performance
precision dual-frequency interferometry[4]
Optics
Laser[1]
What it is
General reference — not yet source-verifiedA precision optics laser of this class is used as a stable optical source for interferometric measurement and alignment tasks. A laser head of this class belongs to metrology and positioning functions rather than to direct wafer processing.
How it works
The Keysight 5517 series uses helium-neon laser technology and provides dual-frequency output for interferometry. The 5517 series offers Zeeman split frequencies, beam size choices, power levels, and special options to meet system requirements.[4][5]
The Keysight 5517C has a reference frequency of 2.4 to 3.0 MHz. The Keysight 5517C has a minimum output power greater than 180 μW. The Keysight 5517C has a warm-up time of 90 minutes. The Keysight 5517C is available with 3 mm, 6 mm, or 9 mm beam diameter options.[4]
Where it fits in the process flow
Applications
The Keysight 5517 series provides 633 nm light for precision dual-frequency interferometry. The Keysight 5517C is used where an interferometric optical source is needed in a transducer system.[4]
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Optics & imaging4
Performance1
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 5517C | — | — | Option C01 is stated in the source record. | waferpedia.com[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of equipment is the Keysight 5517C?
The Keysight 5517C is a laser head in the 5517 series for transducer systems. The 5517 series is a Class II helium-neon laser source family.[4]
What wavelength does the Keysight 5517 series provide?
The Keysight 5517 series provides 633 nm wavelength light.[4]
What beam diameter options are available for the Keysight 5517C?
The Keysight 5517C is available with 3 mm, 6 mm, or 9 mm beam diameter options.[4]
What are the warm-up time and minimum output power for the Keysight 5517C?
The Keysight 5517C has a warm-up time of 90 minutes and a minimum output power greater than 180 μW.[4]
Not publicly documented
The following facts about the 5517 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5517 C are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 5517 C are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5517 C are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5517 C is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 5517 C are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]inventory listing
- [4]keysight.com — keysight.comkeysight.com
- [5]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
Compare with similar tools
View all →
The OGP 0020 Contour Projector is a precision optics contour projector made by OGP (Optical Gaging Products).
The Perkin Elmer 1050 UV-VIS Spectrometer is an instrument used for analyzing ultraviolet and visible light absorption spectra.
The Agilent 11980 A is a fiber optic interferometer for precision optical measurements.