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Keysight

5517 C

Keysight 5517 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Keysight/Agilent 5517 C is a laser. The 5517 C is compatible with ASML PAS 5500 systems.[1][2][3]

Keysight5517 C
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What it is

The Keysight 5517 C is a laser that is compatible with the ASML PAS 5500 lithography system.[1][2][3]

What do the numbers mean?

Optics & imaging1

Type
Laser[1]
Accurate?

Configuration & options4

Compatible with ASML PAS 5500 Part Number: SERV 502 30876[1]
Accurate?
Compatible with ASML PAS 5500 Part Number: 4022 435 23251[2]
Accurate?
Compatible with ASML PAS 5500 Part Number: 4022 435 23411[3]
Accurate?
Compatibility
ASML PAS 5500[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Keysight 5517 C?

The Keysight 5517 C is a laser.[1][2][3]

Which lithography system is the 5517 C compatible with?

The 5517 C is compatible with the ASML PAS 5500.[1][2][3]

Not publicly documented

The following facts about the 5517 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5517 C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 5517 C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 5517 C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 5517 C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 5517 C is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
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Last updated Sep 1, 2026.

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