Waferpedia
Waferpedia
/
KLA
/
KLA 2138 XP
Tool family
KLA 2138 XP
KLA
·
Metrology & Inspection
·
1 entry
LinkedIn
X
Email
Copy link
Models in this family
2138 XP
The KLA 2138 XP is an inspection system for wafer defect inspection.
