Waferpedia

Tool family

KLA 21xx

KLAMetrology & Inspection5 entries
LinkedIn X Email

Models in this family

  1. 2131
  2. 2132 Brightfield

    The KLA 2132 Brightfield is a brightfield inspection tool stated to support 6-inch and 8-inch wafers.

  3. 2133 Brightfield

    The KLA 2133 Brightfield is a wafer inspection tool for 6-inch wafers.

  4. 2135 Brightfield
  5. 2138 Brightfield

    The KLA 2138 Brightfield Inspection is an 8-inch wafer inspection tool.

All entries

  1. 2131KLA
    CategoryMetrology & Inspection
    1 spec
  2. 2132 BrightfieldKLA

    The KLA 2132 Brightfield is a brightfield inspection tool stated to support 6-inch and 8-inch wafers.

    CategoryMetrology & Inspection
    1 spec
  3. 2133 BrightfieldKLA

    The KLA 2133 Brightfield is a wafer inspection tool for 6-inch wafers.

    CategoryMetrology & InspectionWaferWafer Transfer
    9 specs
  4. 2135 BrightfieldKLA
    CategoryMetrology & Inspection
    5 specs
  5. 2138 BrightfieldKLA

    The KLA 2138 Brightfield Inspection is an 8-inch wafer inspection tool.

    CategoryMetrology & Inspection
    5 specs