Waferpedia

Tool family

KLA 2351

Models in this family

  1. The KLA 2351 is an inspection system available in 8-inch and 12-inch wafer configurations, with source-listed inspection components including a wafer transfer system and stage.

All entries

  1. 2351KLA

    The KLA 2351 is an inspection system available in 8-inch and 12-inch wafer configurations, with source-listed inspection components including a wafer transfer system and stage.

    CategoryMetrology & InspectionWaferWafer Transfer System
    21 specs
  2. 2351 UIKLA
    CategoryMetrology & Inspection
    3 specs