Waferpedia

Tool family

KLA Candela 8520

Models in this family

All entries

  1. Candela 8520 SurfaceKLA
    CategoryMetrology & Inspection
    4 specs
  2. Candela 8520 WaferKLA
    CategoryMetrology & InspectionWaferWafer Thickness 350μm ~ 1100μm
    23 specs