KLA
Candela 8520 Wafer
Wafer size
Wafer Thickness 350μm ~ 1100μm
Power
50/60 Hz[1]
Vacuum
100 psi / 689 KPa (± 10% range)[2]
Optics
The Candela 85 XX uses two lasers[2]
What is it?
What do the numbers mean?
Power & electrical5
Vacuum & pumping2
Wafer handling3
Optics & imaging3
Control & software1
- SECS-GEM Interfaces[2]
Configuration & options9
- 20 A[1]
- 3 Wire[2]
- AMC
- maximum concentration of Volatile Organic Compounds (VOC) must be less than 150 ng/l.[2]
- Anions must be less than 14 ng/l. Cations must be less than 10 ng/l.[2]
- Moisture Content
- less than 20 PPM at 1.0 atm, corresponding to a dewpoint of -30° Celsius (-22°F).[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Candela 8520 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela 8520 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela 8520 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela 8520 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela 8520 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela 8520 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
Last updated Jul 29, 2026.
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