KLA F

Models in this family

1. 

   F 10 RT UV Thin Film Analyzer

   The KLA / Filmetrics F 10 RT UV Thin Film Analyzer is a thin film analyzer with a thickness range of 1nm to 40µm and a wavelength range of 190–1100nm.

2. 

   F 20 UV Thin Film Measurement

   The KLA / Filmetrics F 20 UV is a thin film measurement system.

3. 

   F 5 X Film Thickness Measurement

   KLA / Filmetrics F 5 X is a film thickness measurement equipment model.

4. 

   F 50 Thin Film Thickness Mapper

   The KLA / Filmetrics F 50 is a thin film thickness mapper.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   205-0881	—	—	—	Equipment inventory listing[1]
   F50-UV	—	—	Required for measurement of thinner films.	kla.com[2]
   F50-NIR	—	—	Required for measurement of rougher, thicker and more opaque films.	kla.com[2]
   F50-EXR	—	—	Covers 20 nm to 250 µm thickness range.	kla.com[2]
   F50-UVX	—	—	Covers 5 nm to 250 µm thickness range.	kla.com[2]
   F50-XT	—	—	Covers 0.2 µm to 450 µm thickness range.	kla.com[2]
   F50-s980	—	—	Covers 4 µm to 1 mm thickness range.	kla.com[2]
   F50-s1310	—	—	Covers 7 µm to 2 mm thickness range.	kla.com[2]
   F50-s1550	—	—	Covers 10 µm to 3 mm thickness range.	kla.com[2]

5. 

   F 60 C XT Film Thickness Measurement

   The KLA / Filmetrics F 60 C XT is a film thickness measurement system.

Sources