KLA
F 50 Thin Film Thickness Mapper
The KLA / Filmetrics F 50 is a thin film thickness mapper used for measuring thin film thickness on semiconductor wafers. The F 50 covers a spectral range of 378.90 nm to 1050.80 nm.[1]
What it is
The KLA / Filmetrics F 50 is a thin film thickness mapper. The Filmetrics F50 is an automated film thickness mapping instrument. The Filmetrics F50 measures film thickness of photoresist, polymer films, and other non-metallic films when the film is smooth and has a known refractive index model.[2][3]
How it works
The Filmetrics F50 includes an automated or motorized r-theta stage for wafer mapping. The Filmetrics F50 maps film thickness on wafers up to 450 mm. The Filmetrics F50 operates at about 0.5 seconds per site. The Filmetrics F50 can provide thickness measurements as fast as two points per second. The Filmetrics F50 can map wafers with predefined polar, rectangular, or linear map patterns, and it supports center or edge exclusion. The Filmetrics F50 also supports user defined maps.[3][4]
Where it fits in the process flow
General reference — not yet source-verifiedThin film thickness mappers are metrology tools used after a film-forming step or after a film-modifying step when thickness uniformity must be checked. Thin film thickness mappers are commonly placed after coating, deposition, planarization, or etch steps to verify that the wafer remains within the intended process window. Thin film thickness mappers feed measurement results back to process engineering for recipe tuning, uniformity control, and excursion detection.
Applications
The Filmetrics F50 measures film thickness of photoresist, polymer films, and other non-metallic films. The Filmetrics F50 is capable of mapping oxide on silicon, nitride on silicon, polysilicon on oxide on silicon, and photoresist on silicon. The Filmetrics F50 also supports index of refraction and absorption determination, expressed as n and k. The Filmetrics F50 is used for thickness mapping of chemical mechanical polished thin films and for optical constants determination of deposited films.[3][4]
What do the numbers mean?
Wafer handling1
Optics & imaging9
Control & software1
Configuration & options15
- Model 205-0881[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 205-0881 | — | — | — | Equipment inventory listing[1] |
| F50-UV | — | — | Required for measurement of thinner films. | kla.com[3] |
| F50-NIR | — | — | Required for measurement of rougher, thicker and more opaque films. | kla.com[3] |
| F50-EXR | — | — | Covers 20 nm to 250 µm thickness range. | kla.com[3] |
| F50-UVX | — | — | Covers 5 nm to 250 µm thickness range. | kla.com[3] |
| F50-XT | — | — | Covers 0.2 µm to 450 µm thickness range. | kla.com[3] |
| F50-s980 | — | — | Covers 4 µm to 1 mm thickness range. | kla.com[3] |
| F50-s1310 | — | — | Covers 7 µm to 2 mm thickness range. | kla.com[3] |
| F50-s1550 | — | — | Covers 10 µm to 3 mm thickness range. | kla.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What stage architecture does the Filmetrics F50 use for mapping?
The Filmetrics F50 includes an automated or motorized r-theta stage for wafer mapping.[3][4]
What mapping patterns does the Filmetrics F50 support?
The Filmetrics F50 is capable of mapping wafers using predefined polar, rectangular, or linear map patterns. The Filmetrics F50 also supports center or edge exclusion and user defined maps.[4]
Not publicly documented
The following facts about the F 50 Thin Film Thickness Mapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F 50 Thin Film Thickness Mapper are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F 50 Thin Film Thickness Mapper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F 50 Thin Film Thickness Mapper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F 50 Thin Film Thickness Mapper is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F 50 Thin Film Thickness Mapper are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Last updated Oct 20, 2026.
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