Waferpedia

Tool family

KLA ICOS

KLAMetrology & Inspection4 entries
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Models in this family

  1. ICOS CI 8 X 50 Lead

    KLA ICOS CI 8 X 50 Lead is a lead scanner described with 3.4 kW power and related operating requirements.

  2. ICOS CI 9450

    The KLA ICOS CI 9450 is an inspection system.

  3. ICOS CI T 120
  4. ICOS HM 200 / WI 2250 Automatic

All entries

  1. ICOS CI 8 X 50 LeadKLA

    KLA ICOS CI 8 X 50 Lead is a lead scanner described with 3.4 kW power and related operating requirements.

    CategoryLithography
    9 specs
  2. ICOS CI 9450KLA

    The KLA ICOS CI 9450 is an inspection system.

    CategoryMetrology & Inspection
    1 spec
  3. ICOS CI T 120KLA
    2 specs
  4. ICOS HM 200 / WI 2250 AutomaticKLA
    CategoryMetrology & Inspection
    3 specs