Waferpedia

Tool family

KLA OP

KLA5 entries

Models in this family

  1. The KLA / Therma-wave OP 1600 is a film thickness measurement system for 8-inch wafers.

  2. The KLA/Therma-wave OP 2690 DUV is a film thickness measurement tool described as incomplete.

  3. The KLA / Therma-wave OP 5220 is a film thickness measurement tool.

  4. KLA / Therma-wave OP 7341 XP is a film thickness measurement system for 12-inch wafers.

All entries

  1. OP 1600 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 1600 is a film thickness measurement system for 8-inch wafers.

    3 specs
  2. OP 2690 DUV Film Thickness MeasurementKLA

    The KLA/Therma-wave OP 2690 DUV is a film thickness measurement tool described as incomplete.

    1 spec
  3. OP 3260 DUV Film Thickness MeasurementKLA
    3 specs
  4. OP 5220 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 5220 is a film thickness measurement tool.

    1 spec
  5. OP 7341 XP Film Thickness MeasurementKLA

    KLA / Therma-wave OP 7341 XP is a film thickness measurement system for 12-inch wafers.

    CategoryLithographyWafer25 wafer load ports (Asyst) with robot transfer (2 paddies)
    18 specs