Tool family
The KLA / Therma-wave OP 1600 is a film thickness measurement system for 8-inch wafers.
The KLA/Therma-wave OP 2690 DUV is a film thickness measurement tool described as incomplete.
The KLA / Therma-wave OP 5220 is a film thickness measurement tool.
KLA / Therma-wave OP 7341 XP is a film thickness measurement system for 12-inch wafers.
The KLA / Therma-wave OP 1600 is a film thickness measurement system for 8-inch wafers.
The KLA/Therma-wave OP 2690 DUV is a film thickness measurement tool described as incomplete.
The KLA / Therma-wave OP 5220 is a film thickness measurement tool.
KLA / Therma-wave OP 7341 XP is a film thickness measurement system for 12-inch wafers.