Waferpedia

Tool family

KLA OP 2600

KLA3 entries

Models in this family

  1. The KLA / Therma-wave OP 2600 is an 8-inch film thickness measurement system.

All entries

  1. OP 2600KLA
    3 specs
  2. OP 2600 DUV Film Thickness MeasurementKLA
    2 specs
  3. OP 2600 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 2600 is an 8-inch film thickness measurement system.

    1 spec