Waferpedia

Tool family

KLA OP 2600

KLA3 entries
Email

Models in this family

  1. OP 2600

    The KLA OP 2600 is a Therma-Wave film thickness measurement tool.

  2. OP 2600 DUV Film Thickness Measurement
  3. OP 2600 Film Thickness Measurement

    The KLA / Therma-wave OP 2600 is an 8-inch film thickness measurement system.

All entries

  1. OP 2600KLA

    The KLA OP 2600 is a Therma-Wave film thickness measurement tool.

    CategoryMetrology & Inspection
    23 specs
  2. OP 2600 DUV Film Thickness MeasurementKLA
    CategoryMetrology & Inspection
    8 specs
  3. OP 2600 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 2600 is an 8-inch film thickness measurement system.

    6 specs