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Tool family

KLA OP 5240

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Models in this family

  1. OP 5240 Film Thickness Measurement

    The KLA / Therma-wave OP 5240 is a film thickness measurement system for 6-inch and 8-inch wafers.

  2. OP 5240 I

All entries

  1. OP 5240 Film Thickness MeasurementKLA

    The KLA / Therma-wave OP 5240 is a film thickness measurement system for 6-inch and 8-inch wafers.

    CategoryLithography
    11 specs
  2. OP 5240 IKLA
    CategoryMetrology & Inspection
    3 specs