Tool family

KLA P-17

The KLA Tencor P-17 is a mechanical profilometer with a stated Z range of 1 mm, vertical resolution of 0.6 Å, and lateral resolution of 0.5 µm.

Models in this family

P-17
The KLA Tencor P-17 is an eighth-generation benchtop stylus profiler for measuring step height, roughness, bow, and stress on substrates up to 200 mm.
Cited variants
Designation Generation Vintage Changes Source
Tencor P-17 OF (Open Frame) — — Larger frame to allow loading of larger samples; can be configured for 300 mm wafers or a 240 x 240 mm chuck. kla.com^[1]

Designation	Generation	Vintage	Changes	Source
Tencor P-17 OF (Open Frame)	—	—	Larger frame to allow loading of larger samples; can be configured for 300 mm wafers or a 240 x 240 mm chuck.	kla.com^[1]

Sources (1)Every fact above is drawn from these public sources