Waferpedia

Tool family

KLA P-20H

The KLA P-20H is a stylus profilometer used for measuring surface topography, thin-film thickness, wafer bow, and surface roughness.

Models in this family

  1. P-20HLegacy

    The KLA P-20H is a stylus profilometer used for measuring surface topography, thin-film thickness, wafer bow, and surface roughness.