KLA Profilm

Models in this family

1. Profilm 3 D Optical

   The KLA Profilm 3 D Optical is a white light interferometric optical profilometer for non-contact 3D surface topography measurement.

2. 

   Profilm 3D Wafer

   The KLA Profilm 3D Wafer is a Filmetrics Profilm3D optical profilometer used for non-contact 3D surface topography measurements.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Profilm3D-200	—	—	Adds a larger motorized X-Y stage with 200mm by 200mm travel.	kla.com[1]

Sources