KLA Puma 9120

Models in this family

1. Puma 9120 Darkfield Defect

   The KLA Puma 9120 Darkfield Defect Inspection System is a wafer inspection system stated to support 8-inch and 12-inch wafers.

2. Puma 9120 Defect

   The KLA Puma 9120 Defect Inspection is a defect inspection system stated to support 8-inch and 12-inch wafers.