KLA SpectraCD 200

Models in this family

1. SpectraCD 200 Lamp Heat Sink

   The KLA SpectraCD 200 Lamp Heat Sink is a replaceable assembly within the SpectraCD 200 equipment platform.

2. SpectraCD 200 Lamp House Window

   The KLA SpectraCD 200 Lamp House Window is a lamp-house window component for the KLA SpectraCD 200, specified by part number 29-0177.

3. SpectraCD 200 Wafer

   The KLA SpectraCD 200 is a wafer inspection system.