Waferpedia

KLA

SpectraCD 200 Wafer

KLASpectraCD 200 Wafer
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What is it?

What do the numbers mean?

Power & electrical2

Glentek (Z) Servo AMP, Trap, SMA8105, Z-Stage[3]
Accurate?
Glentek (XY) Servo AMP, SINE, SMA8705, X & Y Stage[4]
Accurate?

Configuration & options3

WIN, FUSED SILICA,1.0 DIA, 1/16[1]
Accurate?
WINDOW, FS,12MM X .17MM[2]
Accurate?
Lamp lamps, New Glass 75W Xeon 0334524-000 (Hamamatsu L2174-04K)[5]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationGlentek (Z) Servo AMP, Trap, SMA8105, Z-Stage[3]
  • ConfigurationGlentek (XY) Servo AMP, SINE, SMA8705, X & Y Stage[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SpectraCD 200 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SpectraCD 200 Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SpectraCD 200 Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SpectraCD 200 Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SpectraCD 200 Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SpectraCD 200 Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
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Last updated Jul 29, 2026.

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