Waferpedia

Tool family

KLA Surfscan 6220

KLAMetrology & Inspection4 entries
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Models in this family

  1. Surfscan 6220

    KLA Surfscan 6220 is an unpatterned surface inspection system for wafer particle and surface defect inspection.

  2. Surfscan 6220 Particle Defect
  3. Surfscan 6220 Refurbishment Services
  4. Surfscan 6220 Wafer

All entries

  1. Surfscan 6220KLA

    KLA Surfscan 6220 is an unpatterned surface inspection system for wafer particle and surface defect inspection.

    CategoryMetrology & Inspection
    4 specs
  2. Surfscan 6220 Particle DefectKLA
    CategoryMetrology & Inspection
    3 specs
  3. Surfscan 6220 Refurbishment ServicesKLA
    10 specs
  4. Surfscan 6220 WaferKLA
    CategoryMetrology & Inspection
    6 specs