Waferpedia

Tool family

KLA Surfscan 6400

KLA4 entries
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Models in this family

  1. Surfscan 6400

    The KLA Surfscan 6400 is an unpatterned bare-wafer surface defect and particle inspection system.

  2. Surfscan 6400 Film Surface Analysis
  3. Surfscan 6400 Particle Defect
  4. Surfscan 6400 Refurbishment Services

    KLA Surfscan 6400 Refurbishment Services is a refurbishment-only offering for a client system.

All entries

  1. Surfscan 6400KLA

    The KLA Surfscan 6400 is an unpatterned bare-wafer surface defect and particle inspection system.

  2. Surfscan 6400 Film Surface AnalysisKLA
    CategoryMetrology & Inspection
    4 specs
  3. Surfscan 6400 Particle DefectKLA
    CategoryMetrology & Inspection
    12 specs
  4. Surfscan 6400 Refurbishment ServicesKLA

    KLA Surfscan 6400 Refurbishment Services is a refurbishment-only offering for a client system.

    10 specs