KLA
Surfscan 6400
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The Surfscan 6400 uses optical particle inspection on bare wafers. It measures light scattering from the wafer surface, then evaluates the scattered signal to identify defects and estimate particle sensitivity, count accuracy, repeatability, and spatial resolution.[2][3][4][5]
For this model, the illumination source is a 30 mW argon-ion laser at 488 nm wavelength. The tool also supports automatic substrate thickness adjustment within a 2 mm range and single puck handling from a single cassette or platform.[3][4][5]
Applications
The tool is specified with up to 200 mm wafer capability, throughput up to 120 wafers per hour using 150 mm wafers and up to 95 wafers per hour using 200 mm wafers, defect sensitivity better than 0.20 um on most surfaces and better than 0.15 um on polished silicon at 95 percent capture rate, count accuracy better than 99 percent, and contamination less than 0.5 particles per square centimeter above 0.20 um diameter per single pass.[2][3][4][5]
What do the numbers mean?
No specifications recorded yet
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Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- KLA Surfscan 6400 SBC UpgradeIn Productionsource[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Surfscan 6400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the Surfscan 6400 are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6400 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6400 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6400 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6400 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]KLA Tencor Surfscan 6400 | Brumley South — brumleysouth.combrumleysouth.com
- [3]KLA-Tencor Surfscan 6400 Particle Inspection | Used | ClassOne — classoneequipment.comclassoneequipment.com
- [4]KLA Surfscan 6400 Unpatterned wafer surface particle inspection system for sale — fabsurplus.comfabsurplus.com
- [5]KLA-Tencor Surfscan 6400 — wotol.comwotol.com
- [6]Equipment inventory listing
Last updated Jul 29, 2026.
