Tool family
KLA Surfscan 6420
Models in this family
KLA Surfscan 6420 Refurbishment Services are offered as refurbishment only for a client system with a solid state laser and upgraded components.
The KLA Surfscan 6420 is an unpatterned surface inspection system for 8-inch wafers.
All entries
- Surfscan 6420 Particle DefectKLACategoryMetrology & Inspection5 specs
- Surfscan 6420 Refurbishment ServicesKLA
KLA Surfscan 6420 Refurbishment Services are offered as refurbishment only for a client system with a solid state laser and upgraded components.
10 specs - Surfscan 6420 Unpatterned SurfaceKLA
The KLA Surfscan 6420 is an unpatterned surface inspection system for 8-inch wafers.
CategoryMetrology & Inspection4 specs