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KLA

Surfscan 6420 Refurbishment Services

KLA Surfscan 6420 family
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KLA Surfscan 6420 Refurbishment Services are refurbishment-only services for a client system. KLA Surfscan 6420 Refurbishment Services include a solid state laser. KLA Surfscan 6420 Refurbishment Services include a new or upgraded SBC replacing the old Trenton SBC.[1][2]

KLASurfscan 6420 Refurbishment Services
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  • Plate 01KLA Surfscan 6420 by ClassOne

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  • Plate 02KLA-Tencor Surfscan 6420 Defect Inspection System (ID# 4346)

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  • Plate 03Video 1 - KLA-Tencor Surfscan 6420 Defect Inspection System (ID# 3405)

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  • Plate 04Video 1 - KLA-Tencor Surfscan 6420 Defect Inspection System (ID# 3619)

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  • Plate 05Video 1 - KLA-Tencor Surfscan 6420 Defect Inspection System (ID# 3406)

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  • Plate 06KLA-Tencor Surfscan 6420 Defect Inspection System (ID# 4216)

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What it is

The KLA Surfscan 6420 Refurbishment Services are refurbishment-only services for a client system. The KLA Surfscan 6420 Refurbishment Services include a solid state laser. The KLA Surfscan 6420 Refurbishment Services include a new or upgraded SBC replacing the old Trenton SBC. The KLA Surfscan 6420 Refurbishment Services include a solid state hard drive, a solid state back up hard drive, USB 2.0 readiness, a new USB mouse, and a new USB keyboard. The KLA Surfscan 6420 Refurbishment Services include a parts warranty on the system.[1][2]

How it works

The KLA Surfscan 6420 Refurbishment Services include a solid state laser as part of the refurbishment scope. The refurbishment scope includes replacement or upgrade of the SBC and replacement of rotating-storage elements with solid state storage components.[1][2]

What do the numbers mean?

Optics & imaging3

Solid State Laser (5 Year Warranty)[1]
Accurate?
Laser
Solid state laser[2]
Accurate?
Laser warranty
5 year warranty[2]
Accurate?

Configuration & options18

Refurbishment Only of Client System[1]
Accurate?
New/Upgraded SBC Replacing the old Trenton SBC[1]
Accurate?
Solid State Hard Drive[1]
Accurate?
Solid State Back Up Hard Drive[1]
Accurate?
USB 2.0 Ready[1]
Accurate?
New USB Mouse[1]
Accurate?
New USB Keyboard[1]
Accurate?
1 Year Parts Warranty on System[1]
Accurate?
Lead Time - 12 to 16 Weeks (depending on production schedule)[1]
Accurate?
Service type
Refurbishment only of client system[2]
Accurate?
SBC
New/upgraded SBC replacing the old Trenton SBC[2]
Accurate?
Storage
Solid state hard drive[2]
Accurate?
Backup storage
Solid state back up hard drive[2]
Accurate?
USB
USB 2.0 ready[2]
Accurate?
Mouse
New USB mouse[2]
Accurate?
Keyboard
New USB keyboard[2]
Accurate?
Parts warranty
1 year parts warranty on system[2]
Accurate?
Lead time
12 to 16 weeks depending on production schedule[1]
Accurate?
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Frequently asked questions

What type of offering is the KLA Surfscan 6420 Refurbishment Services?

The KLA Surfscan 6420 Refurbishment Services are refurbishment only for a client system.[1][2]

Does the refurbishment include a laser update?

The KLA Surfscan 6420 Refurbishment Services include a solid state laser.[1][2]

What storage-related updates are included?

The KLA Surfscan 6420 Refurbishment Services include a solid state hard drive and a solid state back up hard drive.[1][2]

What operator interface updates are included?

The KLA Surfscan 6420 Refurbishment Services are USB 2.0 ready and include a new USB mouse and a new USB keyboard.[1][2]

What system warranty is included?

The KLA Surfscan 6420 Refurbishment Services include a 1 year parts warranty on the system.[1][2]

Not publicly documented

The following facts about the Surfscan 6420 Refurbishment Services are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6420 Refurbishment Services are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6420 Refurbishment Services are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan 6420 Refurbishment Services are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan 6420 Refurbishment Services are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan 6420 Refurbishment Services is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 17, 2026.

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