Waferpedia

Tool family

Lam Research Concept One

Lam ResearchDeposition2 entries
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Models in this family

  1. Concept One

    Cited variants

    DesignationGenerationVintageChangesSource
    6 inch version——Listed with 6-inch wafer size; one listing includes Nitride / TEOS and 3 Phase, 50/60 Hz, 208V Vac.Equipment inventory listing[1]
    8 inch version—2012Listed with 8-inch wafer size and 2012 vintage; one listing includes Nitride / TEOS and 208V, 50/60 Hz, 3 Phase.Equipment inventory listing[2]
  2. Concept One TEOS

All entries

  1. Concept OneLam Research
    CategoryDeposition
    24 specs
  2. Concept One TEOSLam Research
    1 spec

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing