Lam Research

Concept One

Deposition Lam Research Concept One family

Research Quality: 30% complete

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Concept One — Inventory photo — Fig. 01Concept OneInventory photo^[1]

Power

3 Phase^[1]

Vacuum

Does not include Dry Pumps^[7]

Gas delivery

External^[7]

What it is

The Lam / Novellus Concept One is a chemical vapor deposition system.^[1]^[2]^[8]^[5]^[10]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Missing PC
Missing remote A/C Box

What do the numbers mean?

Power & electrical6

Phase: 3 Phase^[1]; 50/60 Hz^[1]
Voltage: 208V Vac^[1]
Voltage: 208V^[2]; LF RF Generator^[7]; Quad power supply^[7]

Vacuum & pumping1

Does not include Dry Pumps^[7]

Accurate?

Wafer handling1

One Arm Robot: Lift, Rotate Motor^[7]

Gas & chemistry1

Gas Box Type: External^[7]

Control & software3

Missing PC^[5]
Host Interface: SECS-^[7]; UI Computer^[7]

Configuration & options12

Nitride / TEOS^[1]; Nitride / TEOS-R^[2]; Missing remote A/C Box^[5]; Silicon Nitride^[6]; 5 Wires^[7]; WOPS Sensor^[7]; Signal Tower^[7]
EMO's: Push Button^[7]; Missing Parts:^[7]; Pin search PCB^[7]; Lift motor Driver^[7]; CPU & RAM Board^[7]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
6 inch version	—	—	Listed with 6-inch wafer size; one listing includes Nitride / TEOS and 3 Phase, 50/60 Hz, 208V Vac.	Equipment inventory listing^[1]
8 inch version	—	2012	Listed with 8-inch wafer size and 2012 vintage; one listing includes Nitride / TEOS and 208V, 50/60 Hz, 3 Phase.	Equipment inventory listing^[8]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Configuration50/60 Hz^[1]
Voltage208V Vac^[1]
Voltage208V^[2]
Gas Box TypeExternal^[7]
ConfigurationDoes not include Dry Pumps^[7]
ConfigurationLF RF Generator^[7]
ConfigurationQuad power supply^[7]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

Lam / Novellus Concept One ModulesIn Productionsource^[9]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Concept One are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept One are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Concept One are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Concept One is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the Concept One are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No description of the Concept One is on record.
Answerable by: an engineer who operated it or an OEM application specialist