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Tool family

Lam Research Gasonics PEP 4800

Lam ResearchEtch2 entries
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Models in this family

  1. Gasonics PEP 4800 DL
  2. Gasonics PEP 4800 DL Iridia

    The Lam / Novellus / Gasonics PEP 4800 DL Iridia is a dual-chamber etcher.

All entries

  1. Gasonics PEP 4800 DLLam Research
    CategoryEtch
    7 specs
  2. Gasonics PEP 4800 DL IridiaLam Research

    The Lam / Novellus / Gasonics PEP 4800 DL Iridia is a dual-chamber etcher.

    CategoryEtch
    1 spec