Lam Research
Gasonics PEP 4800 DL Iridia
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research Gasonics PEP 4800 DL Iridia is an etcher. The Lam Research Gasonics PEP 4800 DL Iridia is a dual-chamber tool.[1][2]
What it is
How it works
General reference — not yet source-verifiedAn etcher removes material from a wafer by controlled exposure to a reactive process environment. An etcher in semiconductor manufacturing uses that controlled removal to pattern films after lithography has defined the areas to be processed.
A dual-chamber etcher provides two process chambers within one tool platform. A dual-chamber architecture supports sequential or parallel processing while keeping the etch function centralized in a single equipment frame.
Where it fits in the process flow
General reference — not yet source-verifiedAn etcher sits in the pattern-transfer portion of the wafer fabrication flow. An etcher follows lithographic definition of features and precedes later cleaning, inspection, or deposition steps that occur after material removal.
Applications
General reference — not yet source-verifiedThe Lam Research Gasonics PEP 4800 DL Iridia serves semiconductor etch processing. An etcher of this class is used for material removal in pattern transfer on processed wafers.
What do the numbers mean?
Configuration & options4
- Dual chamber[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Gasonics PEP 4800 DL Iridia are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics PEP 4800 DL Iridia are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics PEP 4800 DL Iridia are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics PEP 4800 DL Iridia are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics PEP 4800 DL Iridia are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics PEP 4800 DL Iridia is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
Last updated Oct 13, 2026.
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