Waferpedia

Tool family

Lam Research Kiyo

Lam ResearchEtch2 entries
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Models in this family

  1. Kiyo 45

    The Lam Kiyo 45 is an etcher with a configuration described as 2 chamber + 1 strip.

  2. Kiyo FX

All entries

  1. Kiyo 45Lam Research

    The Lam Kiyo 45 is an etcher with a configuration described as 2 chamber + 1 strip.

    CategoryEtch
    12 specs
  2. Kiyo FXLam Research
    CategoryEtch
    1 spec