Lam Research

Kiyo 45

Etch Lam Research Kiyo family

Research Quality: 30% complete

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Kiyo 45 — Inventory photo — Fig. 01Kiyo 45Inventory photo^[1]

Power

Lam 3156110-214 Bias RF Generator^[1]

Vacuum

0.1 Torr^[1]

What is it?

The Lam Kiyo 45 is an etcher with a configuration described as 2 chamber + 1 strip.

What do the numbers mean?

Power & electrical2

Lam 3156110-214 Bias RF Generator^[1]

Accurate?

Lam 3156110-313 TCP RF Generator^[1]

Accurate?

Vacuum & pumping5

MKS E28B-30200 Process Vacuum Gauge: 0.1 Torr^[1]
MKS 625A-14059 Chamber Vacuum Gauge: 1 Torr^[1]
MKS D24B12TCECB0 Micro Wave Vacuum Gauge: 100 Tor^[1]; Edwards SCU 1500 Turbo Pump^[1]; Edwards SCU 1600 Turbo Pump Controller^[1]

Wafer handling2

ATM Robot: Brooks P/N 138150^[1]
TM Robot: Brooks P/N 201600-01^[1]

Configuration & options3

2 Chamber + 1 Strip^[1]
Loadport: Brooks 799-701175-005^[1]; Teledyne HPM-2002-OBE-LM Air Lock Hesting Gasuge^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

MKS E28B-30200 Process Vacuum Gauge0.1 Torr^[1]
MKS 625A-14059 Chamber Vacuum Gauge1 Torr^[1]
MKS D24B12TCECB0 Micro Wave Vacuum Gauge100 Tor^[1]
ConfigurationEdwards SCU 1500 Turbo Pump^[1]
ConfigurationEdwards SCU 1600 Turbo Pump Controller^[1]
ConfigurationLam 3156110-214 Bias RF Generator^[1]
ConfigurationLam 3156110-313 TCP RF Generator^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Kiyo 45 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kiyo 45 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kiyo 45 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kiyo 45 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kiyo 45 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kiyo 45 is not on record.
Answerable by: an OEM datasheet or a fab qualification report