Waferpedia

Tool family

Lam Research Rainbow 4420

Lam ResearchEtch2 entries
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Models in this family

  1. Rainbow 4420

    Lam Research Rainbow 4420 is an etch system used in semiconductor manufacturing. Machines of this class remove selected material from a wafer or similar substrate using a controlled process intended to transfer patterns and form device features.

    Cited variants

    DesignationGenerationVintageChangesSource
    Rainbow 4420 Plasma Etcher, 8"—19948-inch wafer size; Envision 1.5 software; CIM SECS; process CMOS; Harmonics Arm (2); SMIF (2); LL Pump; TCU 2080; AC Rack; PC Pump; 208 volts.Equipment inventory listing[1]
  2. Rainbow 4420 Polysilicon

    The Lam Rainbow 4420 Polysilicon Etcher is a cassette-to-cassette single wafer etcher for 6-inch wafers.

All entries

  1. Rainbow 4420Lam Research

    General referenceLam Research Rainbow 4420 is an etch system used in semiconductor manufacturing. Machines of this class remove selected material from a wafer or similar substrate using a controlled process intended to transfer patterns and form device features.

    CategoryEtch
    17 specs
  2. Rainbow 4420 PolysiliconLam Research

    The Lam Rainbow 4420 Polysilicon Etcher is a cassette-to-cassette single wafer etcher for 6-inch wafers.

    CategoryEtchWaferCassette to Cassette Single Wafer Etcher
    6 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing