Waferpedia

Tool family

Lam Research Rainbow 4520 i Oxide

Lam ResearchEtch1 entry

Lam Research Rainbow 4520 i Oxide Etcher.

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Models in this family

  1. Rainbow 4520 i Oxide

    The Lam Rainbow 4520 i Oxide is an oxide etcher. The Lam Rainbow 4520 i Oxide is configured for 8-inch wafers.