Waferpedia

Tool family

Lam Research Rainbow 4526

Lam ResearchEtch2 entries
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Models in this family

  1. Rainbow 4526 I

    The Lam Research Rainbow 4526 I is a dry etcher for 6-inch (150 mm) wafers.

  2. Rainbow 4526 XL

    The Lam Rainbow 4526 XL is a plasma etcher used for oxide etch on 6-inch and 8-inch wafers.

All entries

  1. Rainbow 4526 ILam Research

    The Lam Research Rainbow 4526 I is a dry etcher for 6-inch (150 mm) wafers.

    CategoryEtch
    8 specs
  2. Rainbow 4526 XLLam Research

    The Lam Rainbow 4526 XL is a plasma etcher used for oxide etch on 6-inch and 8-inch wafers.

    CategoryEtch
    38 specs