Lam Research
Rainbow 4526 I
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research Rainbow 4526 I is a dry etcher. The Rainbow 4526 I processes 6-inch (150 mm) wafers. The Rainbow 4526 I is a 'Classic' dry etcher.[1][2]
What it is
How it works
General reference — not yet source-verifiedA dry etcher removes material from a wafer surface by using a plasma or reactive gas process rather than liquid chemistry.
A dry etcher generally transfers patterned information into exposed films while unexposed regions remain protected by a mask or resist.
Where it fits in the process flow
General reference — not yet source-verifiedDry etching sits in the pattern-transfer stage of wafer fabrication after lithography has defined the areas to be opened.
Dry etching commonly follows film deposition or oxidation when a patterned layer must be selectively removed.
Applications
General reference — not yet source-verifiedA dry etcher is used for patterning semiconductor films on wafers.
A dry etcher is used for anisotropic material removal when vertical sidewalls and fine pattern transfer are needed.
What do the numbers mean?
Wafer handling3
Configuration & options5
- Classic[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Rainbow 4526 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4526 I are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4526 I are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4526 I are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4526 I are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4526 I is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]fabsurplus.com — fabsurplus.comfabsurplus.com
- [2]Equipment inventory listing
- [3]Inventory photo
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 21, 2026.
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